See Section 7.5
for important information.PARAMETER | | MIN | NOM | MAX | UNIT |
---|
Mirror tilt angle, variation device to
device(1)(2)(3)(4) | | 11 | 12 | 13 | ° |
Number of out-of-specification micromirrors(5) | Adjacent micromirrors | | | 0 | micromirrors |
Non-adjacent micromirrors | | | 10 |
(1) Measured relative to the plane formed by the overall micromirror
array
(2) Variation can occur between any two individual micromirrors located on the same device or located on different devices.
(3) Additional
variation exists between the
micromirror
array and the
package
datums. See
the
package drawing.
(5) An
"out-of-specification
micromirror"
is defined as a micromirror that is unable to transition between the two landed
states.