SLVK172 June 2024 TPS7H3014-SP
The TPS7H3014-SP is fabricated in the TI Linear BiCMOS 250nm process with a back-end-of-line (BEOL) stack consisting of four levels of standard thickness aluminum. The total stack height from the surface of the passivation to the silicon surface is 11.44μm based on nominal layer thickness as shown in Figure 5-1. Accounting for energy loss through the 1-mil thick Aramica beam port window, the 40mm air gap, and the BEOL stack over the TPS7H3014-SP, the effective LET (LETEFF) at the surface of the silicon substrate and the depth was determined with the SEUSS 2020 Software (provided by the Texas A&M Cyclotron Institute and based on the latest SRIM-2013 [7] models). The results are shown in Table 5-1.
ION TYPE | BEAM ENERGY (MeV/nucleon) | ANGLE OF INCIDENCE | DEGRADER STEPS (#) | DEGRADER ANGLE | RANGE IN SILICON (µm) | LETEFF (MeV·cm2/mg) |
---|---|---|---|---|---|---|
165Ho | 15 | 0 | 0 | 0 | 95.7 | 75 |