SBOK092 December 2024 OPA4H199-SP
The OPA4H199-SP is fabricated in the TI Linear BiCMOS 9 (LBC9) 130nm process with a back-end-of-line (BEOL) stack consisting of four levels of standard thickness aluminum and Damascene copper. The total stack height from the surface of the passivation to the silicon surface is 2.5μm. The decapped unit exposes the silicon to the ion radiation beam. Accounting for energy loss through the 1mil thick Aramica beam port window, the air gap, and the BEOL stack over the OPA4H199-SP, the effective LET (LETEFF) at the surface of the silicon substrate and the depth was determined with the SEUSS 2020 Software (provided by the Texas A&M Cyclotron Institute and based on the latest SRIM-2013 [7] models). The results are shown in Table 8-3.
ION | Angle of Incidence (°) | LETEFF (MeV × cm2/mg) | Distance (mm) | FLUX (ions × cm2/mg) | Fluence (Number ions) |
---|---|---|---|---|---|
141Pr | 0 | 65 | 50 | 1.15 × 105 | 1.10 × 107 |
109Ag | 0 | 51 | 75 | 1.08 × 105 | 9.95 × 106 |
109Ag | 0 | 47 | 40 | 1.06 × 105 | 9.96 × 106 |
84Kr | 0 | 32 | 75 | 1.09 × 105 | 1.00 × 107 |
63Cu | 0 | 19 | 30 | 1.01 × 105 | 9.97 × 106 |
40Ar | 0 | 8 | 30 | 1.01 × 105 | 1.00 × 107 |
20Ne | 0 | 3 | 30 | 1.17 × 105 | 1.00 × 107 |