SNOK010 November 2024 TPS7H6005-SEP
The TPS7H60x5-SEP is fabricated in the TI Linear BiCMOS 250nm process with a 4LM back-end-of-line (BEOL) stack. The total stack height from the surface of the passivation to the silicon surface is 10.9μm based on nominal layer thickness as shown in Figure 5-1. Accounting for energy loss through the 1mil thick Aramica beam port window, the 70mm air gap, and the BEOL stack over the TPS7H60x5-SEP, the effective LET (LETEFF) at the surface of the silicon substrate and the depth was determined with information provided by the MSU FRIB. The results are shown in Ion LETEFF, Depth, and Range in Silicon.
Ion Type | Beam Energy (MeV / nucleon) | Angle of Incidence | Degrader Steps (Number) | Degrader Angle | Range in Silicon (µm) | LETEFF (MeV × cm2/ mg) |
---|---|---|---|---|---|---|
109Ag | 15 | 0 | 0 | 0 | 95.1 | 48 |
129Xe | 25 | 0 | 0 | 0 | 144 | 50.5 |