SLVK146 august 2023 TPS7H2211-SEP
PRODUCTION DATA
The TPS7H2211-SEP is fabricated in the TI Linear BiCMOS 7 (LBC7, 250-nm process with a Back-End-Of-Line (BEOL) stack consisting of four levels of standard thickness aluminum metal. The total stack height from the surface of the passivation to the silicon surface is 13.5 μm based on nominal layer thickness as shown in Figure 5-1. Accounting for energy loss through the 1-mil thick Aramica beam port window, the 40-mm air gap and the BEOL stack over the TPS7H2211-SEP, the effective LET (LETEFF) at the surface of the silicon substrate, the depth, and the ion range was determined with the SEUSS 2020 Software (provided by the Texas A&M Cyclotron Institute and based on the latest SRIM-2013 (7) models). Table 5-1 lists the results. The stack was modeled as a homogeneous layer of silicon dioxide (valid since SiO2 and aluminum density are similar).
Ion Type | Angle of Incidence (°) | RangeEFF in Silicon (µm) | LETEFF (MeV·cm2/mg) |
---|---|---|---|
109Ag | 0 | 91.6 | 48 |