DLPA027B January   2024  – April 2024 DLP500YX , DLP5500 , DLP6500FLQ , DLP6500FYE , DLP650LNIR , DLP670S , DLP7000 , DLP7000UV , DLP9000 , DLP9000X , DLP9000XUV , DLP9500 , DLP9500UV

 

  1.   1
  2.   Abstract
  3.   Trademarks
  4. 1Heating of a DMD Micromirror
    1. 1.1 Mirror Surface to Bulk Mirror Delta (ΔTMIRROR_SURFACE-TO-BULK_MIRROR)
    2. 1.2 Bulk Mirror to Silicon Delta (ΔTBULK_MIRROR-TO-SILICON)
    3. 1.3 Silicon to Ceramic Delta (ΔTSILICON-TO-CERAMIC)
  5. 2Calculating Mirror Surface Temperature With Pulsed Optical Sources
    1. 2.1 Mirror Surface to Bulk Mirror Delta (ΔTMIRROR_SURFACE-TO-BULK_MIRROR)
    2. 2.2 Bulk Mirror to Silicon Delta (ΔTBULK_MIRROR-TO-SILICON)
    3. 2.3 Silicon to Ceramic Delta (ΔTSILICON-TO-CERAMIC)
    4. 2.4 Calculating Mirror Surface to Ceramic Delta (ΔTMIRROR_SURFACE-TO-CERAMIC)
  6. 3Sample Calculations
  7. 4Summary
  8. 5References
  9. 6Revision History

2.4 Calculating Mirror Surface to Ceramic Delta (ΔTMIRROR_SURFACE-TO-CERAMIC)

We have shown how to calculate the temperature rise of the silicon above the backside ceramic of the package, the bulk mirror temperature rise above the silicon, and the mirror surface temperature rise above the bulk mirror temperature. The total mirror surface temperature rise is simply the sum of these three:

Equation 4. TMIRROR SURFACE - TCERAMIC = ΔTSILICON-TO-CERAMIC + ΔTBULK_MIRROR-TO-SILICON + ΔTMIRROR_SURFACE-TO-BULK_MIRROR